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YACOOT, A. KLAPETEK, P. VALTR, M. GROLICH, P. DONGMO, H. LAZZERINI, M. BRIDGES, A.
Original Title
Design and performance of a test rig for evaluation of nanopositioning stages
Type
journal article in Web of Science
Language
English
Original Abstract
Nanopositioning stages are used in many areas of nanotechnology and advanced materials analysis, often being integrated into analytical devices such as scanning probe and optical microscopes and manufacturing devices (e.g. lithographic systems). We present a metrological instrument, together with software, designed for traceable evaluation of stage performance. The system capabilities and performance are illustrated by measurement of stages of different levels of accuracy, including a low cost custom built stage manufactured by 3D printing. The traceability of the system is described and main uncertainty sources are discussed. Guidelines are given for the specification of stage performance.
Keywords
multi-axis positioning stages; traceability; nanopositioning; dimensional metrology
Authors
YACOOT, A.; KLAPETEK, P.; VALTR, M.; GROLICH, P.; DONGMO, H.; LAZZERINI, M.; BRIDGES, A.
Released
7. 2. 2019
Publisher
IOP PUBLISHING LTD
Location
BRISTOL
ISBN
1361-6501
Periodical
Measurement Science and Technology
Year of study
30
Number
3
State
United Kingdom of Great Britain and Northern Ireland
Pages from
1
Pages to
10
Pages count
URL
https://iopscience.iop.org/article/10.1088/1361-6501/aafd03
BibTex
@article{BUT160891, author="Andrew {Yacoot} and Petr {Klapetek} and Miroslav {Valtr} and Petr {Grolich} and Herve {Dongmo} and Mattia {Lazzerini} and Angus {Bridges}", title="Design and performance of a test rig for evaluation of nanopositioning stages", journal="Measurement Science and Technology", year="2019", volume="30", number="3", pages="1--10", doi="10.1088/1361-6501/aafd03", issn="1361-6501", url="https://iopscience.iop.org/article/10.1088/1361-6501/aafd03" }