Publication detail

Simple and efficient AlN-based piezoelectric energy harvesters

GABLECH, I. KLEMPA, J. PEKÁREK, J. VYROUBAL, P. HRABINA, J. HOLÁ, M. KUNZ, J. BRODSKÝ, J. NEUŽIL, P.

Original Title

Simple and efficient AlN-based piezoelectric energy harvesters

Type

journal article in Web of Science

Language

English

Original Abstract

In this work, we demonstrate the simple fabrication process of AlN-based piezoelectric energy harvesters (PEH), which are made of cantilevers consisting of a multilayer ion beam-assisted deposition. The preferentially (001) orientated AlN thin films possess exceptionally high piezoelectric coefficients d33 of (7.33 ± 0.08) pC∙N−1. The fabrication of PEH was completed using just three lithography steps, conventional silicon substrate with full control of the cantilever thickness, in addition to the thickness of the proof mass. As the AlN deposition was conducted at a temperature of ≈ 330 °C, the process can be implemented into standard complementary metal oxide semiconductor (CMOS) technology, as well as the CMOS wafer post-processing. The PEH cantilever deflection and efficiency were characterized using both laser interferometry, and a vibration shaker, respectively. This technology could become a core feature for future CMOS-based energy harvesters.

Keywords

AlN; MEMS cantilever; CMOS compatible; energy harvesting; high performance

Authors

GABLECH, I.; KLEMPA, J.; PEKÁREK, J.; VYROUBAL, P.; HRABINA, J.; HOLÁ, M.; KUNZ, J.; BRODSKÝ, J.; NEUŽIL, P.

Released

28. 1. 2020

Publisher

MDPI

Location

Basel, Switzerland

ISBN

2072-666X

Periodical

Micromachines

Year of study

11

Number

2

State

Swiss Confederation

Pages from

1

Pages to

10

Pages count

10

URL

https://www.mdpi.com/2072-666X/11/2/143

Full text in the Digital Library

http://hdl.handle.net/11012/186577

BibTex

@article{BUT161587,
  author="Imrich {Gablech} and Jaroslav {Klempa} and Jan {Pekárek} and Petr {Vyroubal} and Jan {Hrabina} and Miroslava {Holá} and Jan {Kunz} and Jan {Brodský} and Pavel {Neužil}",
  title="Simple and efficient AlN-based piezoelectric energy harvesters",
  journal="Micromachines",
  year="2020",
  volume="11",
  number="2",
  pages="1--10",
  doi="10.3390/mi11020143",
  issn="2072-666X",
  url="https://www.mdpi.com/2072-666X/11/2/143"
}