Publication detail

Detection of Low Energy Backscattered Electrons in SEM

Petr Wandrol, Rudolf Autrata

Original Title

Detection of Low Energy Backscattered Electrons in SEM

Type

conference paper

Language

English

Original Abstract

The main goal of the work was to find an efficient way for the detection of low energy backscattered electrons. Application of the low accelerating voltage of the primary electron beam became due to its obvious advantages very popular in last decade. Instruments which are able to work with accelerating voltage of 3 keV and lower are called Low Voltage Scanning Electron Microscopes (LV SEMs). Detection of the backscattered electrons (BSEs) in LV SEM is because of their low energy very questionable.

Keywords

low energy backscattered electrons, detection

Authors

Petr Wandrol, Rudolf Autrata

RIV year

2005

Released

28. 8. 2005

Publisher

Paul Scherrer Institut

Pages from

61

Pages to

61

Pages count

1

BibTex

@inproceedings{BUT16530,
  author="Petr {Wandrol} and Rudolf {Autrata}",
  title="Detection of Low Energy Backscattered Electrons in SEM",
  booktitle="PSI Proceedings of Dreilandertagung Microscopy Conference 2005",
  year="2005",
  volume="05",
  number="1",
  pages="1",
  publisher="Paul Scherrer Institut"
}