Detail publikace

Detection of Low Energy Backscattered Electrons in SEM

Petr Wandrol, Rudolf Autrata

Originální název

Detection of Low Energy Backscattered Electrons in SEM

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The main goal of the work was to find an efficient way for the detection of low energy backscattered electrons. Application of the low accelerating voltage of the primary electron beam became due to its obvious advantages very popular in last decade. Instruments which are able to work with accelerating voltage of 3 keV and lower are called Low Voltage Scanning Electron Microscopes (LV SEMs). Detection of the backscattered electrons (BSEs) in LV SEM is because of their low energy very questionable.

Klíčová slova

low energy backscattered electrons, detection

Autoři

Petr Wandrol, Rudolf Autrata

Rok RIV

2005

Vydáno

28. 8. 2005

Nakladatel

Paul Scherrer Institut

Strany od

61

Strany do

61

Strany počet

1

BibTex

@inproceedings{BUT16530,
  author="Petr {Wandrol} and Rudolf {Autrata}",
  title="Detection of Low Energy Backscattered Electrons in SEM",
  booktitle="PSI Proceedings of Dreilandertagung Microscopy Conference 2005",
  year="2005",
  volume="05",
  number="1",
  pages="1",
  publisher="Paul Scherrer Institut"
}