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LIU, X. FECKO, P. FOHLEROVÁ, Z. PEKÁREK, J. KARÁSEK, T. NEUŽIL, P.
Original Title
Parylene Micropillars Coated with Thermally Grown SiO2
Type
journal article in Web of Science
Language
English
Original Abstract
The modification of surface properties frequently requires the binding of suitable compounds to the original surface. Silanes or thiols can be directly covalently bonded to either Si-based materials or Au, thus ruling out polymers. Here, we show the utilization of a layer of SiO2 with a thickness of a few nanometers that serves as a cross-linker between polymers and silanes providing covalent bonding to the surface. We deposited a polymer onto a thermally oxidized microstructured Si surface followed by subsequent Si removal. We demonstrated a Si-based nanotechnology fabrication method that can be generally used to modify the surface properties of practically any polymer via SiO2 cross-linking. This can produce any topology, including microstructures, nanostructures, or composite microstructure/nanostructures terminating in different shapes, since all the steps involving polymer deposition are conducted at room temperature after the Si surface has been thermally oxidized. This technique opens a broad field of new applications for polymers in microstructures and nanostructures that have stable water surface contact angle values with the contact angle set by demand for gecko-mimicking structures or lotus leaf inspired surfaces.
Keywords
micropillars, SiO2, parylene
Authors
LIU, X.; FECKO, P.; FOHLEROVÁ, Z.; PEKÁREK, J.; KARÁSEK, T.; NEUŽIL, P.
Released
9. 11. 2020
ISBN
2166-2746
Periodical
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Year of study
38
Number
1
State
United States of America
Pages from
Pages to
43
Pages count
6
URL
https://avs.scitation.org/doi/10.1116/6.0000558
BibTex
@article{BUT165596, author="LIU, X. and FECKO, P. and FOHLEROVÁ, Z. and PEKÁREK, J. and KARÁSEK, T. and NEUŽIL, P.", title="Parylene Micropillars Coated with Thermally Grown SiO2", journal="JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B", year="2020", volume="38", number="1", pages="38--43", doi="10.1116/6.0000558", issn="2166-2746", url="https://avs.scitation.org/doi/10.1116/6.0000558" }