Publication detail

Development of The Bulge Test Equipment For Measuring Mechanical Properties of Thin Films

HOLZER, J. et al.

Original Title

Development of The Bulge Test Equipment For Measuring Mechanical Properties of Thin Films

Type

conference paper

Language

English

Original Abstract

The bulge test apparatus designed for the measurement of mechanical material properties of thin films was constructed and tested. The principle of the test is to apply pressure on a free-standing membrane, to measure the membrane shape and to analyse the results. Commercially available silicon nitride (Si3N4) thin films were used for the testing. It is shown that interferometric set-up designed and assembled for the apparatus enables precise determination of 3D shape of the whole membrane, which allows more precise determination of materials parameters compared to measurement of the height of the center of the membrane only. Fit of an analytical formula gives values of Young modulus and residual stress with very good agreement with the literature data. Moreover, FEM model of the bulged membrane was developed. The main aim of the effort is to enable measurement of plastic properties of a thin film of interest, that will be deposited on the Si3N4 membrane with known properties and bulge test will be performed on the bilayer specimen. Subsequently, the material properties of the thin film will be obtained using FEM analysis.

Keywords

Equipment testing, Mechanical properties, Membranes, Metallurgy, Metals, Nitrogen compounds, Plastic deformation, Silicon nitride

Authors

HOLZER, J.; et al.

Released

19. 10. 2017

Publisher

TANGER Ltd.

Location

Brno, Czech Republic

ISBN

9788087294796

Book

METAL 2017 - 26th International Conference on Metallurgy and Materials, Conference Proceedings

Edition

26

Edition number

1

Pages from

1053

Pages to

1058

Pages count

6

URL

https://www.researchgate.net/publication/317166528_Development_of_the_bulge_test_equipment_for_measuring_mechanical_properties_of_thin_films

BibTex

@inproceedings{BUT165776,
  author="Jakub {Holzer} and Hector Andres {Tinoco Navarro} and Tomáš {Kruml} and Tomáš {Pikálek} and Zdeněk {Buchta} and Josef {Lazar}",
  title="Development of The Bulge Test Equipment For Measuring Mechanical Properties of Thin Films",
  booktitle="METAL 2017 - 26th International Conference on Metallurgy and Materials, Conference Proceedings",
  year="2017",
  series="26",
  number="1",
  pages="1053--1058",
  publisher="TANGER Ltd.",
  address="Brno, Czech Republic",
  isbn="9788087294796",
  url="https://www.researchgate.net/publication/317166528_Development_of_the_bulge_test_equipment_for_measuring_mechanical_properties_of_thin_films"
}