Publication result detail

Computations of the Low Voltage BSE Detector in SEM

Petr Wandrol

Original Title

Computations of the Low Voltage BSE Detector in SEM

English Title

Computations of the Low Voltage BSE Detector in SEM

Type

Paper in proceedings (conference paper)

Original Abstract

This paper deals with the possibilities of backscattered electrons detection by scintillation detector in low voltage scanning electron microscope (LV SEM). Low energy of signal electrons, especially backscattered electrons, is the reason of lower detectors yield. While the problem of secondary electrons detection was successfully solved by their extraction using a magnetic field and detection in objective lens, efficient detection of backscattered electrons remains unsolved. The initial energy of backscattered electrons of 0.7-3 kV is the energy, on which the light yield of scintillators decreases. Backscattered electrons with this energy will be accelerated to scintillator by electrostatic field and secondary electrons with maximal energy of 50 eV will be filtered by an energy filter or by a magnetic field.

English abstract

This paper deals with the possibilities of backscattered electrons detection by scintillation detector in low voltage scanning electron microscope (LV SEM). Low energy of signal electrons, especially backscattered electrons, is the reason of lower detectors yield. While the problem of secondary electrons detection was successfully solved by their extraction using a magnetic field and detection in objective lens, efficient detection of backscattered electrons remains unsolved. The initial energy of backscattered electrons of 0.7-3 kV is the energy, on which the light yield of scintillators decreases. Backscattered electrons with this energy will be accelerated to scintillator by electrostatic field and secondary electrons with maximal energy of 50 eV will be filtered by an energy filter or by a magnetic field.

Keywords

low voltage scanning electron microscopy, LV SEM, backscattered electrons, detection

Key words in English

low voltage scanning electron microscopy, LV SEM, backscattered electrons, detection

Authors

Petr Wandrol

Released

01.01.2005

Publisher

Vysoké učení technické v Brně

Location

Brno

ISBN

80-214-2889-9

Book

proceedings of the 11th Conference Student EEICT 2005

Pages from

337

Pages count

4

BibTex

@inproceedings{BUT16672,
  author="Petr {Wandrol}",
  title="Computations of the Low Voltage BSE Detector in SEM",
  booktitle="proceedings of the 11th Conference Student EEICT 2005",
  year="2005",
  number="1",
  pages="4",
  publisher="Vysoké učení technické v Brně",
  address="Brno",
  isbn="80-214-2889-9"
}