Publication detail

Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry

VOHÁNKA, J. ŠUSTEK, Š. BURŠÍKOVÁ, V. ŠKLÍBOVÁ, V. ŠULC, V. HOMOLA, V. FRANTA, D. ČERMÁK, M. OHLÍDAL, M. OHLÍDAL, I.

Original Title

Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry

Type

journal article in Web of Science

Language

English

Original Abstract

The effects of thickness non-uniformity on measured optical quantities must be often considered in the optical characterization. The effects of thickness non-uniformity can be taken into account by averaging the Mueller matrices over the distribution of local thicknesses within the measured area. The distribution of local thicknesses can be assumed in a certain form (e.g. the uniform distribution), or it can be derived on the basis of a model assuming a certain shape of thickness non-uniformity. The latter approach is especially useful for the variable-angle spectroscopic ellipsometry since it can take into account dependence on the incidence angle due to the changes in the size of the light spot. This paper presents results of the optical characterization of three polymer-like thin films highly non-uniform in thickness using variable-angle spectroscopic ellipsometry. The shapes of the thickness non-uniform films are determined on the basis of a model assuming local thicknesses given by quadratic polynomials in coordinates along the surfaces of the films. The studied areas on the films were also measured by the imaging spectroscopic reflectometry, which provides a more direct method to determine local thicknesses. The results achieved using the imaging spectroscopic reflectometry and variable-angle spectroscopic ellipsometry were then compared.

Keywords

Thickness non-uniformity; Ellipsometry; Imaging spectroscopic reflectometry

Authors

VOHÁNKA, J.; ŠUSTEK, Š.; BURŠÍKOVÁ, V.; ŠKLÍBOVÁ, V.; ŠULC, V.; HOMOLA, V.; FRANTA, D.; ČERMÁK, M.; OHLÍDAL, M.; OHLÍDAL, I.

Released

30. 12. 2020

Publisher

ELSEVIER

Location

AMSTERDAM

ISBN

1873-5584

Periodical

APPLIED SURFACE SCIENCE

Year of study

534

Number

147625

State

Kingdom of the Netherlands

Pages from

1

Pages to

10

Pages count

10

URL

https://www.sciencedirect.com/science/article/pii/S0169433220323825?via%3Dihub

BibTex

@article{BUT167469,
  author="Jíří {Vohánka} and Štěpán {Šustek} and Vilma {Buršíková} and Veronika {Šklíbová} and Václav {Šulc} and Vojtěch {Homola} and Daniel {Franta} and Martin {Čermák} and Miloslav {Ohlídal} and Ivan {Ohlídal}",
  title="Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry",
  journal="APPLIED SURFACE SCIENCE",
  year="2020",
  volume="534",
  number="147625",
  pages="1--10",
  doi="10.1016/j.apsusc.2020.147625",
  issn="1873-5584",
  url="https://www.sciencedirect.com/science/article/pii/S0169433220323825?via%3Dihub"
}