Publication detail

Nanolithography Toolbox: Device design at the nanoscale

Balram, KC. Westly, DA. Davanco, M. Grutter, KE. Li, Q. Michels, T. Ray, CH. Yu, L. Kasica, RJ. Wallin, CB. Gilbert, IJ. Bryce, BA. Simelgor, G. Topolancik, J. Lobontiu, N. Liu, Y. Neuzil, P. Svatos, V. Dill, KA. Bertrand, NA. Metzler, M. Lopez, G. Czaplewski, DA. Ocola, L. Srinivasan, KA. Stavis, S. Aksyuk, VA. Liddle, JA. Krylov, S. Ilic, BR.

Original Title

Nanolithography Toolbox: Device design at the nanoscale

Type

conference paper

Language

English

Original Abstract

We have developed a platform-independent software package for designing nanometer scaled device architectures. The Nanolithography Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices.

Keywords

LITHOGRAPHY; RESOLUTION; PLATFORM

Authors

Balram, KC.; Westly, DA.; Davanco, M.; Grutter, KE.; Li, Q.; Michels, T.; Ray, CH.; Yu, L.; Kasica, RJ.; Wallin, CB.; Gilbert, IJ.; Bryce, BA.; Simelgor, G.; Topolancik, J.; Lobontiu, N.; Liu, Y.; Neuzil, P.; Svatos, V.; Dill, KA.; Bertrand, NA.; Metzler, M.; Lopez, G.; Czaplewski, DA.; Ocola, L.; Srinivasan, KA.; Stavis, S.; Aksyuk, VA.; Liddle, JA.; Krylov, S.; Ilic, BR.

Released

14. 5. 2017

ISBN

978-1-9435-8027-9

Book

2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)

Pages from

1

Pages to

2

Pages count

2

BibTex

@inproceedings{BUT170237,
  author="Balram, KC. and Westly, DA. and Davanco, M. and Grutter, KE. and Li, Q. and Michels, T. and Ray, CH. and Yu, L. and Kasica, RJ. and Wallin, CB. and Gilbert, IJ. and Bryce, BA. and Simelgor, G. and Topolancik, J. and Lobontiu, N. and Liu, Y. and Neuzil, P. and Svatos, V. and Dill, KA. and Bertrand, NA. and Metzler, M. and Lopez, G. and Czaplewski, DA. and Ocola, L. and Srinivasan, KA. and Stavis, S. and Aksyuk, VA. and Liddle, JA. and Krylov, S. and Ilic, BR.",
  title="Nanolithography Toolbox: Device design at the nanoscale",
  booktitle="2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)",
  year="2017",
  pages="1--2",
  isbn="978-1-9435-8027-9"
}