Publication detail

Characterization of AlN nanolayers deposited on a surface of HOPG by PE-ALD

DALLAEV, R.

Original Title

Characterization of AlN nanolayers deposited on a surface of HOPG by PE-ALD

Type

conference paper

Language

English

Original Abstract

In this study plasma-enhanced atomic layer deposition process of AlN has been performed with the purpose to test the expediency of highly oriented pyrolytic graphite (HOPG) to serve as a substrate in such process. The obtained samples were thoroughly analyzed using various analytical techniques. Atomic force microscopy was employed for studying topographic and morphological features of the surface; x-ray photoelectron spectroscopy (XPS) analysis supported by second ion-mass spectrometry method (SIMS) has been conducted on the obtained sample to investigate the chemical nature of the deposited films as well as elemental distribution. Temperature stability of HOPG makes it a suitable substrate for preparation of AlN films, being a bottom contact for further testing of the films electrical properties. The data gathered from the aforementioned techniques have indicated that HOPG is a viable choice for AlN ALD process.

Keywords

aluminium nitride, atomic layer deposition, highly oriented pyrolytic graphite, x-ray photoelectron spectroscopy, atomic force microscopy, second ion-mass spectrometry.

Authors

DALLAEV, R.

Released

10. 6. 2021

Publisher

Brno University of Technology, Faculty of Electrical Engineering and Communication

Location

Brno

ISBN

978-80-214-5943-4

Book

Proceedings of the 27th Conference STUDENT EEICT 2021 selected papers

Edition

1

Pages from

193

Pages to

198

Pages count

6

URL

https://www.eeict.cz/eeict_download/archiv/sborniky/EEICT_2021_sbornik_2_v3_DOI.pdf

BibTex

@inproceedings{BUT171782,
  author="Rashid {Dallaev}",
  title="Characterization of AlN nanolayers deposited on a surface of HOPG by PE-ALD",
  booktitle="Proceedings of the 27th Conference STUDENT EEICT 2021 selected papers",
  year="2021",
  series="1",
  pages="193--198",
  publisher="Brno University of Technology, Faculty of Electrical Engineering and Communication",
  address="Brno",
  doi="10.13164/eeict.2021.193",
  isbn="978-80-214-5943-4",
  url="https://www.eeict.cz/eeict_download/archiv/sborniky/EEICT_2021_sbornik_2_v3_DOI.pdf"
}