Publication detail

Optical measurement of mechanical stresses in diamond-like carbon films

OHLÍDAL, I., FRANTA, D., ČUDEK, V., BURŠÍKOVÁ, V., KLAPETEK, P., JÁKL, M.

Original Title

Optical measurement of mechanical stresses in diamond-like carbon films

Type

conference paper

Language

English

Original Abstract

In this paper the mechanical stresses taking place in diamond thin films prepared by the plasma enhanced chemical vapor deposition onto silicon single crystal substrates are studied. For determination of the stress values the Stoneys formula is used. The values of the film thickness are determined using the combined method of variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. The values of the curvature radii of the deformed silicon substrates in consequence of the film stresses are evaluated using interferometric method based on two-beam interferometry and chromatic aberration method. The dependence of the mechanical stress inside these films on their thickness values is determined. It is found that this dependence can be approximate by the straigth line. The results achieved for the mechanical stresses obtainedby both the optical methods, i.e. by the interferometric and chromatic aberration method, are compared. It is shown that within the experimental accuracy the stress values determined using using both these methods are identical.

Keywords

DLC films, mechanical stress, two-beam interferometry, chromatic aberration method

Authors

OHLÍDAL, I., FRANTA, D., ČUDEK, V., BURŠÍKOVÁ, V., KLAPETEK, P., JÁKL, M.

RIV year

2005

Released

14. 2. 2005

Publisher

Society of Photo-Optical Instrumentation Engineers (SPIE)

Location

Bellingham, Washington

ISBN

0-8194-5757-4

Book

PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)

ISBN

0277-786X

Periodical

Proceedings of SPIE

Year of study

5776

Number

2

State

United States of America

Pages from

717

Pages to

728

Pages count

12

BibTex

@inproceedings{BUT17226,
  author="Ivan {Ohlídal} and Daniel {Franta} and Miloslav {Ohlídal} and Vladimír {Čudek} and Petr {Klapetek} and Vilma {Buršíková} and Miloš {Jákl}",
  title="Optical measurement of mechanical stresses in diamond-like carbon films",
  booktitle="PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)",
  year="2005",
  journal="Proceedings of SPIE",
  volume="5776",
  number="2",
  pages="717--728",
  publisher="Society of Photo-Optical Instrumentation Engineers (SPIE)",
  address="Bellingham, Washington",
  isbn="0-8194-5757-4",
  issn="0277-786X"
}