Publication detail

Vertical Graphene Growth on AlCu4Mg Alloy by PECVD Technique

POLZER, A. SEDLÁK, J. SEDLÁČEK, J. BENEŠ, L. MOURALOVÁ, K.

Original Title

Vertical Graphene Growth on AlCu4Mg Alloy by PECVD Technique

Type

journal article in Web of Science

Language

English

Original Abstract

Vertical graphene, which belongs to nanomaterials, is a very promising tool for improving the useful properties of long-used and proven materials. Since the growth of vertical graphene is different on each base material and has specific deposition setting parameters, it is necessary to examine each base material separately. For this reason, a full factor design of experiment was performed with 2(6) = 64 rounds, which contained additional 5 central points, i.e., a total of 69 rounds of individual experiments, which was to examine the effect of input factors Temperature, Pressure, Flow, CH4, Plasma Power, and Annealing in H-2 on the growth of vertical graphene on aluminum alloy AlCu4Mg. The deposition was performed using plasma-enhanced chemical vapor deposition (PECVD) technology. Mainly, the occurrence of graphene was analyzed, which was confirmed by Raman spectroscopy, as well as its thickness. The characterization was performed using electron and transmission microscopy, including an atomic force microscope. It was found that the growth of graphene occurred in 7 cases and its thickness is affected only by the interaction flow (sccm) x pretreatment H-2 (sccm).

Keywords

vertical graphene; PECVD; aluminum alloy; AlCu4Mg

Authors

POLZER, A.; SEDLÁK, J.; SEDLÁČEK, J.; BENEŠ, L.; MOURALOVÁ, K.

Released

2. 10. 2021

Publisher

MDPI

Location

BASEL

ISBN

2079-6412

Periodical

Coatings, MDPI

Year of study

11

Number

9

State

Swiss Confederation

Pages from

1

Pages to

13

Pages count

13

URL

https://www.mdpi.com/2079-6412/11/9/1108

Full text in the Digital Library

http://hdl.handle.net/11012/201751

BibTex

@article{BUT172661,
  author="Aleš {Polzer} and Josef {Sedlák} and Jan {Sedláček} and Libor {Beneš} and Kateřina {Mouralová}",
  title="Vertical Graphene Growth on AlCu4Mg Alloy by PECVD Technique",
  journal="Coatings, MDPI",
  year="2021",
  volume="11",
  number="9",
  pages="1--13",
  doi="10.3390/coatings11091108",
  issn="2079-6412",
  url="https://www.mdpi.com/2079-6412/11/9/1108"
}