Publication detail

Deposition of MoSe2 flakes using cyclic selenides

CHARVOT, J. ZAZPE MENDIOROZ, R. KRUMPOLEC, R. RODRIGUEZ PEREIRA, J. PAVLIŇÁK, D. POKORNÝ, D. KLIKAR, M. JELÍNKOVÁ, V. MACÁK, J. BUREŠ, F.

Original Title

Deposition of MoSe2 flakes using cyclic selenides

Type

journal article in Web of Science

Language

English

Original Abstract

The currently limited portfolio of volatile organoselenium compounds used for atomic layer deposition (ALD) has been extended by designing and preparing a series of four-, five- and six-membered cyclic silylselenides. Their fundamental properties were tailored by alternating the ring size, the number of embedded Se atoms and the used peripheral alkyl chains. In contrast to former preparations based on formation of sodium or lithium selenides, the newly developed synthetic method utilizes a direct and easy reaction of elemental selenium with chlorosilanes. Novel 2,2,4,4-tetraisopropyl-1,3,2,4-diselenadisiletane, which features good trade-off between chemical/thermal stability and reactivity, has been successfully used for gas-to-solid phase reaction with MoCl5 affording MoSe2. A thorough characterization of the as-deposited 2D MoSe2 flakes revealed its out-of-plane orientation and high purity. Hence, the developed four-membered cyclic silylselenide turned out to be well-suited Se-precursor for ALD of MoSe2.

Keywords

atomic layer deposition; Se

Authors

CHARVOT, J.; ZAZPE MENDIOROZ, R.; KRUMPOLEC, R.; RODRIGUEZ PEREIRA, J.; PAVLIŇÁK, D.; POKORNÝ, D.; KLIKAR, M.; JELÍNKOVÁ, V.; MACÁK, J.; BUREŠ, F.

Released

3. 6. 2021

Publisher

Royal Society of Chemistry

Location

CAMBRIDGE

ISBN

2046-2069

Periodical

RSC Advances

Year of study

11

Number

36

State

United Kingdom of Great Britain and Northern Ireland

Pages from

22140

Pages to

22147

Pages count

8

URL

https://pubs.rsc.org/en/content/articlehtml/2021/ra/d0ra10239c

Full text in the Digital Library

http://hdl.handle.net/11012/203221

BibTex

@article{BUT172926,
  author="Jaroslav {Charvot} and Raúl {Zazpe Mendioroz} and Richard {Krumpolec} and Jhonatan {Rodriguez Pereira} and David {Pavliňák} and Daniel {Pokorný} and Milan {Klikar} and Veronika {Jelínková} and Jan {Macák} and Filip {Bureš}",
  title="Deposition of MoSe2 flakes using cyclic selenides",
  journal="RSC Advances",
  year="2021",
  volume="11",
  number="36",
  pages="22140--22147",
  doi="10.1039/d0ra10239c",
  issn="2046-2069",
  url="https://pubs.rsc.org/en/content/articlehtml/2021/ra/d0ra10239c"
}