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MAXA, J. ŠABACKÁ, P. BAYER, R.
Original Title
Analysis of the effect of reflected shock waves in the experimental chamber
Type
conference paper
Language
English
Original Abstract
As part of the research in the field of vacuum chamber pumping in the Environmental Electron Microscope, research on supersonic flow through apertures is being carried out at the Department of Electrical and Electronic Technology of Brno University of Technology in cooperation with the Institute of Scientific Instruments of the CAS. This paper deals with the influence of reflected shock waves on the resulting flow in the pumped part of the Experimental Chamber.
Keywords
ANSYS Fluent, differentially pumped chamber, environmental scanning electron microscope
Authors
MAXA, J.; ŠABACKÁ, P.; BAYER, R.
Released
30. 11. 2021
ISBN
978-1-60768-864-8
Book
ECS Transactions
Edition
105
Edition number
1
1938-6737
Periodical
ECS Transaction
Year of study
Number
State
United States of America
Pages from
589
Pages to
600
Pages count
12
URL
https://iopscience.iop.org/article/10.1149/10501.0589ecst
BibTex
@inproceedings{BUT175579, author="Jiří {Maxa} and Pavla {Šabacká} and Robert {Bayer}", title="Analysis of the effect of reflected shock waves in the experimental chamber", booktitle="ECS Transactions", year="2021", series="105", journal="ECS Transaction", volume="105", number="1", pages="589--600", doi="10.1149/10501.0589ecst", isbn="978-1-60768-864-8", issn="1938-6737", url="https://iopscience.iop.org/article/10.1149/10501.0589ecst" }