Publication detail

Electrochemical Cell Preparation on MEMS Chip Surface Inside Scanning Electron Microscope

KLVAČ, O. KAZDA, T. ČECH, O. FAM, Y. NOVÁK, L.

Original Title

Electrochemical Cell Preparation on MEMS Chip Surface Inside Scanning Electron Microscope

Type

conference paper

Language

English

Original Abstract

This paper reports the preparation process of an electrochemical cell consisting of metallic lithium, lithium titanate, and ionic liquid on a MEMS chip surface. Firstly, the MEMS chip is described and the connectivity test of the used pads is performed using voltage contrast imaging. Then the process of electrode preparation using the FIB-SEM technique is described in detail. Special attention is paid to lithium, its degradation during transport into the SEM chamber, and the behavior during ion beam cutting. Finally, a complete battery system was built. It was possible to measure charging/discharging of the model battery system, nevertheless, the functionality was affected by the redeposition of conductive materials on the MEMS surface and charging by an electron beam.

Keywords

in-situ; SEM; FIB; MEMS; Li-ion, battery, LTO

Authors

KLVAČ, O.; KAZDA, T.; ČECH, O.; FAM, Y.; NOVÁK, L.

Released

6. 12. 2021

ISBN

1938-6737

Periodical

ECS Transaction

Number

105

State

United States of America

Pages from

655

Pages to

663

Pages count

9

URL

https://iopscience.iop.org/article/10.1149/10501.0655ecst

BibTex

@inproceedings{BUT175592,
  author="Ondřej {Klvač} and Tomáš {Kazda} and Ondřej {Čech} and Yakub {Fam} and Libor {Novák}",
  title="Electrochemical Cell Preparation on MEMS Chip Surface Inside Scanning Electron Microscope",
  booktitle="22nd International Conference Advanced Batteries, Accumulators and Fuel Cells",
  year="2021",
  journal="ECS Transaction",
  number="105",
  pages="655--663",
  doi="10.1149/10501.0655ecst",
  issn="1938-6737",
  url="https://iopscience.iop.org/article/10.1149/10501.0655ecst"
}