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Tinoco, H.A. Holzer, J. Pikálek, T. Sobota, J. Fort, T. Matejka, M. Kruml, T. Hutar, P.
Original Title
Determination of the yield stress in Al thin film by applying bulge test
Type
conference paper
Language
English
Original Abstract
In this work, we have applied an improved method to determine the yield stress and residual stress in a freestanding thin aluminum film by analysing experimental data obtained by the bulge test. The Al thin film was deposited by a magnetron sputtering technique. The film was cyclically loaded with increasing maximum gas pressure. The method to determine the plasticity parameters is based on the load-deflection relation that presents a linear behavior in the elastic regime when it is scaled with the displacement parameter. The plastic deformation induces nonlinear effects that allow determining the elastic limit of the film. At that point, the gas pressure value that generates the elastoplastic transition is identified on the scaled curve. For a bulged square film, the curvatures are computed from an approximated spatial deflection equation to calculate the stresses within the proposed model. The analysis enables construction of biaxial stress-strain curve for the studied film and determination of the yield st
Keywords
Plastic deformation; Residual stresses; Stress-strain curves; Thin films
Authors
Tinoco, H.A.; Holzer, J.; Pikálek, T.; Sobota, J.; Fort, T.; Matejka, M.; Kruml, T.; Hutar, P.
Released
17. 2. 2021
ISBN
1742-6588
Periodical
Journal of Physics: Conference Series
Year of study
1777
Number
1
State
United Kingdom of Great Britain and Northern Ireland
Pages from
Pages to
10
Pages count
URL
https://iopscience-iop-org.ezproxy.lib.vutbr.cz/article/10.1088/1742-6596/1777/1/012030
BibTex
@inproceedings{BUT177179, author="Hector Andres {Tinoco Navarro} and Jakub {Holzer} and Tomáš {Kruml} and Pavel {Hutař}", title="Determination of the yield stress in Al thin film by applying bulge test", booktitle="Journal of Physics: Conference Series", year="2021", journal="Journal of Physics: Conference Series", volume="1777", number="1", pages="1--10", doi="10.1088/1742-6596/1777/1/012030", issn="1742-6588", url="https://iopscience-iop-org.ezproxy.lib.vutbr.cz/article/10.1088/1742-6596/1777/1/012030" }