Publication detail

Determination of the yield stress in Al thin film by applying bulge test

Tinoco, H.A. Holzer, J. Pikálek, T. Sobota, J. Fort, T. Matejka, M. Kruml, T. Hutar, P.

Original Title

Determination of the yield stress in Al thin film by applying bulge test

Type

conference paper

Language

English

Original Abstract

In this work, we have applied an improved method to determine the yield stress and residual stress in a freestanding thin aluminum film by analysing experimental data obtained by the bulge test. The Al thin film was deposited by a magnetron sputtering technique. The film was cyclically loaded with increasing maximum gas pressure. The method to determine the plasticity parameters is based on the load-deflection relation that presents a linear behavior in the elastic regime when it is scaled with the displacement parameter. The plastic deformation induces nonlinear effects that allow determining the elastic limit of the film. At that point, the gas pressure value that generates the elastoplastic transition is identified on the scaled curve. For a bulged square film, the curvatures are computed from an approximated spatial deflection equation to calculate the stresses within the proposed model. The analysis enables construction of biaxial stress-strain curve for the studied film and determination of the yield st

Keywords

Plastic deformation; Residual stresses; Stress-strain curves; Thin films

Authors

Tinoco, H.A.; Holzer, J.; Pikálek, T.; Sobota, J.; Fort, T.; Matejka, M.; Kruml, T.; Hutar, P.

Released

17. 2. 2021

ISBN

1742-6588

Periodical

Journal of Physics: Conference Series

Year of study

1777

Number

1

State

United Kingdom of Great Britain and Northern Ireland

Pages from

1

Pages to

10

Pages count

10

URL

BibTex

@inproceedings{BUT177179,
  author="Hector Andres {Tinoco Navarro} and Jakub {Holzer} and Tomáš {Kruml} and Pavel {Hutař}",
  title="Determination of the yield stress in Al thin film by applying bulge test",
  booktitle="Journal of Physics: Conference Series",
  year="2021",
  journal="Journal of Physics: Conference Series",
  volume="1777",
  number="1",
  pages="1--10",
  doi="10.1088/1742-6596/1777/1/012030",
  issn="1742-6588",
  url="https://iopscience-iop-org.ezproxy.lib.vutbr.cz/article/10.1088/1742-6596/1777/1/012030"
}