Publication detail

Influence of Specimen Size on Ionization Detector Signal Detection

Ing. Pavel ČERNOCH

Original Title

Influence of Specimen Size on Ionization Detector Signal Detection

Type

conference paper

Language

English

Original Abstract

The article deals with the influence of the specimen size on the signal detection by the ionization detector in environmental scanning electron microscope. Results of the computer simulations and the experimental data are used for understanding a relation between the detected signal and the specimen size.

Keywords

Environmental scanning electron microscopy , ionization detektor, contrast.

Authors

Ing. Pavel ČERNOCH

RIV year

2005

Released

2. 1. 2005

Publisher

Vysoké učení Technické v Brně, Fakulta elektrotechniky a komunikačních technologií

Location

Brno

ISBN

80-214-2889-9

Book

Proceedings of The 11th Conference And Competition Student EEICT 2005, Volume 2

Edition number

1

Pages from

207

Pages to

211

Pages count

5

BibTex

@inproceedings{BUT17759,
  author="Pavel {Černoch}",
  title="Influence of Specimen Size on Ionization Detector Signal Detection",
  booktitle="Proceedings of The 11th Conference And Competition Student EEICT 2005, Volume 2",
  year="2005",
  volume="11",
  number="1",
  pages="5",
  publisher="Vysoké učení Technické v Brně, Fakulta elektrotechniky a komunikačních technologií",
  address="Brno",
  isbn="80-214-2889-9"
}