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Publication detail
Ing. Pavel ČERNOCH
Original Title
Influence of Specimen Size on Ionization Detector Signal Detection
Type
conference paper
Language
English
Original Abstract
The article deals with the influence of the specimen size on the signal detection by the ionization detector in environmental scanning electron microscope. Results of the computer simulations and the experimental data are used for understanding a relation between the detected signal and the specimen size.
Keywords
Environmental scanning electron microscopy , ionization detektor, contrast.
Authors
RIV year
2005
Released
2. 1. 2005
Publisher
Vysoké učení Technické v Brně, Fakulta elektrotechniky a komunikačních technologií
Location
Brno
ISBN
80-214-2889-9
Book
Proceedings of The 11th Conference And Competition Student EEICT 2005, Volume 2
Edition number
1
Pages from
207
Pages to
211
Pages count
5
BibTex
@inproceedings{BUT17759, author="Pavel {Černoch}", title="Influence of Specimen Size on Ionization Detector Signal Detection", booktitle="Proceedings of The 11th Conference And Competition Student EEICT 2005, Volume 2", year="2005", volume="11", number="1", pages="5", publisher="Vysoké učení Technické v Brně, Fakulta elektrotechniky a komunikačních technologií", address="Brno", isbn="80-214-2889-9" }