Publication detail

Slip flow analysis in an experimental chamber simulating dif-ferential pumping in the Environmental Scanning Electron Microscope

ŠABACKÁ, P. MAXA, J. BAYER, R. VYROUBAL, P. BINAR, T.

Original Title

Slip flow analysis in an experimental chamber simulating dif-ferential pumping in the Environmental Scanning Electron Microscope

Type

journal article in Web of Science

Language

English

Original Abstract

The paper describes the combination of experimental measurements with mathemati-cal-physics analysis during the investigation of the flow in the aperture at low pressures in a prepared experimental chamber. In the first step, experimental measurements of the pressure in the specimen chamber and at its outlet were performed during the pumping of this chamber from atmospheric pressure to the operating pressure typical for the current AQUASEM II environmental electron microscope at the ISI of the CAS in Brno. Based on these results, a mathematical-physics model was tuned in Ansys Fluent system and sub-sequently used for mathematical-physics analysis in the Slip Flow regime on the nozzle wall at low pressure. These analyzes will be used to fine-tune the experimental chamber and, once the chamber is operational, it will be possible to compare the results obtained from experimental measurements of nozzle wall pressure, static and total pressure, and temperature from the nozzle axis region in supersonic flow with the results obtained from the mathematical-physics analyses. Based on the above comparative analyses, we will be able to determine the realistic Slip Flow at the nozzle wall under different conditions at the continuum mechanics boundary.

Keywords

Ansys Fluent; Slip Flow; Shear Stress; Nozzle; Low Pressure

Authors

ŠABACKÁ, P.; MAXA, J.; BAYER, R.; VYROUBAL, P.; BINAR, T.

Released

24. 11. 2022

Publisher

MDPI

Location

BASEL

ISBN

1424-8220

Periodical

SENSORS

Year of study

22

Number

23

State

Swiss Confederation

Pages from

1

Pages to

24

Pages count

24

URL

https://www.mdpi.com/1424-8220/22/23/9033

BibTex

@article{BUT179821,
  author="Pavla {Šabacká} and Jiří {Maxa} and Robert {Bayer} and Petr {Vyroubal} and Tomáš {Binar}",
  title="Slip flow analysis in an experimental chamber simulating dif-ferential pumping in the Environmental Scanning Electron Microscope",
  journal="SENSORS",
  year="2022",
  volume="22",
  number="23",
  pages="1--24",
  doi="10.3390/s22239033",
  issn="1424-8220",
  url="https://www.mdpi.com/1424-8220/22/23/9033"
}