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Burda D., Knápek A.
Original Title
Effect Of Al2O3 Barrier On The Field Emission Properties Of Tungsten Single-Tip Field Emitters
Type
conference paper
Language
English
Original Abstract
This research aims to obtain a more in-depth understanding of the field emission properties of tungsten single-tip field emitters (STFEs) coated with a several tens of nanometer thin barrier of Al2O3. The introduction of an additional barrier into the metal-vacuum interface system of the emitter can be beneficial to improve its performance. The tungsten emitters were prepared using a two-step electrochemical drop-off etching technique. Thin oxide barrier coatings were prepared by using low-temperature atomic layer deposition (ALD), a chemical vapor deposition technique. Field emission was studied in an internally developed field emission microscope (FEM) working in UHV vacuum (< 1·10−7 Pa), and the experimental field emission data were analyzed by the so-called Murphy-Good plotsThe value of the local work function of the grown oxide layer were investigated using Ultra-violet photoelectron spectroscopy (UPS).
Keywords
Cold field emission; single-tip field emitters; tungsten tip; aluminum oxide; dielectric coatings; Murphy-Good plot
Authors
Released
26. 4. 2022
Publisher
Brno University of Technology, Faculty of Electrical Engineering and Communication
Location
Brno
ISBN
978-80-214-6030-0
Book
Proceedings II of the 28th Conference STUDENT EEICT 2022 Selected papers
Edition
1
Pages from
255
Pages to
258
Pages count
4
URL
https://www.eeict.cz/eeict_download/archiv/sborniky/EEICT_2022_sbornik_2_v3.pdf
BibTex
@inproceedings{BUT180625, author="Daniel {Burda} and Alexandr {Knápek}", title="Effect Of Al2O3 Barrier On The Field Emission Properties Of Tungsten Single-Tip Field Emitters", booktitle="Proceedings II of the 28th Conference STUDENT EEICT 2022 Selected papers", year="2022", series="1", pages="255--258", publisher="Brno University of Technology, Faculty of Electrical Engineering and Communication", address="Brno", doi="10.13164/eeict.2022.255", isbn="978-80-214-6030-0", url="https://www.eeict.cz/eeict_download/archiv/sborniky/EEICT_2022_sbornik_2_v3.pdf" }