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VENSKÝ, J. ŠEVEČEK, O. SKALKA, P. KOTOUL, M. STACHIV, I.
Original Title
Mass sensing using micromechanical resonators operating in nonlinear regime
Type
conference paper
Language
English
Original Abstract
The contribution deals with a numerical modelling and analysis of micro/nano-mechanical resonators operating in the non-linear regime which is intended to be utilized for an enhancement of the resonator sensing range eventually its sensitivity. Standardly the mass spectrometry is performed using the linearly operated resonators, which have however number of limitations. One of the main is a low accuracy of mass detection when particle is too heavy or light with respect to the resonator mass. An alternative way to this approach solving the mentioned drawback is presented here. The particle mass is characterized just from the change of the first resonant frequency and from the maximal vibrational amplitude in the resonators center upon crossing the resonant frequency. Attention is paid also to an analysis of the resonatoŕs mechanical reliability upon its operation.
Keywords
Micromechanical resonator, nonlinear vibrations, mass spectrometry, FEM
Authors
VENSKÝ, J.; ŠEVEČEK, O.; SKALKA, P.; KOTOUL, M.; STACHIV, I.
Released
9. 12. 2022
Publisher
IEEE
Location
Pilsen, Czech Republic
ISBN
978-1-6654-1040-3
Book
2022 20th International Conference on Mechatronics - Mechatronika (ME)
Pages count
4
URL
https://ieeexplore.ieee.org/document/9983052
BibTex
@inproceedings{BUT182226, author="Jiří {Venský} and Oldřich {Ševeček} and Petr {Skalka} and Michal {Kotoul} and Ivo {Stachiv}", title="Mass sensing using micromechanical resonators operating in nonlinear regime", booktitle="2022 20th International Conference on Mechatronics - Mechatronika (ME)", year="2022", pages="4", publisher="IEEE", address="Pilsen, Czech Republic", doi="10.1109/ME54704.2022.9983052", isbn="978-1-6654-1040-3", url="https://ieeexplore.ieee.org/document/9983052" }