Publication detail

Optical characterization of inhomogeneous thin films with randomly rough boundaries exhibiting wide intervals of spatial frequencies

OHLÍDAL, I. VOHANKA, J. BURŠÍKOVÁ, V. DVOŘÁK, J. KLAPETEK, P. KAUR, N.

Original Title

Optical characterization of inhomogeneous thin films with randomly rough boundaries exhibiting wide intervals of spatial frequencies

Type

journal article in Web of Science

Language

English

Original Abstract

Results concerning the optical characterization of two inhomogeneous polymer-like thin films deposited by the plasma enhanced chemical vapor deposition onto silicon single crystal substrates are presented. One of these films is deposited onto a smooth silicon surface while the latter film is deposited on a randomly rough silicon surface with a wide interval of spatial frequencies. A combination of variable-angle spectroscopic ellipsometry and spectroscopic reflectometry applied at near-normal incidence are utilized for characterizing both the films. An inhomogeneity of the films is described by the method based on multiple-beam interference of light and method replacing inhomogeneous thin films by multilayer systems. Homogeneous transition layers between the films and substrates are considered. The Campi-Coriasso dispersion model is used to express spectral dependencies of the optical constants of the polymer-like films and transition layers. A combination of the scalar diffraction theory and Rayleigh-Rice theory is used to include boundary roughness into formulae for the optical quantities of the rough polymer-like film. Within the optical characterization, the spectral dependencies of the optical constants at the upper and lower boundaries of both the polymer-like films are determined together with their thickness values and profiles of the optical constants. Roughness parameters are determined for the rough film. The values of the roughness parameters are confirmed by atomic force microscopy. Moreover, the optical constants and thicknesses of both the transition layers are determined. A discussion of the achieved results for both the polymer-like films and transition layers is performed.(c) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement

Keywords

SPECTROSCOPIC ELLIPSOMETRY; REFRACTIVE-INDEX; SURFACE-ROUGHNESS; MICROSCOPY CHARACTERIZATION; THICKNESS NONUNIFORMITY; STATISTICAL PROPERTIES; HEIGHT DISTRIBUTION; SCATTERING-THEORY; REFLECTION; PARAMETERS

Authors

OHLÍDAL, I.; VOHANKA, J.; BURŠÍKOVÁ, V.; DVOŘÁK, J.; KLAPETEK, P.; KAUR, N.

Released

10. 10. 2022

Publisher

Optica Publishing Group

Location

WASHINGTON

ISBN

1094-4087

Periodical

OPTICS EXPRESS

Year of study

30

Number

21

State

United States of America

Pages from

39068

Pages to

39085

Pages count

18

URL

https://opg.optica.org/oe/fulltext.cfm?uri=oe-30-21-39068&id=509749

BibTex

@article{BUT182350,
  author="OHLÍDAL, I. and VOHANKA, J. and BURŠÍKOVÁ, V. and DVOŘÁK, J. and KLAPETEK, P. and KAUR, N.",
  title="Optical characterization of inhomogeneous thin films with randomly rough boundaries exhibiting wide intervals of spatial frequencies",
  journal="OPTICS EXPRESS",
  year="2022",
  volume="30",
  number="21",
  pages="39068--39085",
  doi="10.1364/OE.470692",
  issn="1094-4087",
  url="https://opg.optica.org/oe/fulltext.cfm?uri=oe-30-21-39068&id=509749"
}