Publication detail

Design and Control of an Active Stage for Suppressing Motion Induced Vibration in Optical Inspection Systems

PAN, S., CHEN, K. VĚCHET, S.

Original Title

Design and Control of an Active Stage for Suppressing Motion Induced Vibration in Optical Inspection Systems

Type

conference paper

Language

English

Original Abstract

Fast positioning and vibration suppression play important roles in virtually all tasks requiring high speed maneuvers with sufficient motion accuracy

Keywords

active stage; rubber bearing; flexible structure; vibration suppression; image inspection

Authors

PAN, S., CHEN, K.; VĚCHET, S.

Released

7. 12. 2022

Location

Pilsen

ISBN

978-1-6654-1040-3

Book

2022 20th International Conference on Mechatronics - Mechatronika (ME)

Pages from

1

Pages to

6

Pages count

6

URL

https://ieeexplore.ieee.org/document/9982985

BibTex

@inproceedings{BUT182474,
  author="PAN, S., CHEN, K. and VĚCHET, S.",
  title="Design and Control of an Active Stage for Suppressing Motion Induced Vibration in Optical Inspection Systems",
  booktitle="2022 20th International Conference on Mechatronics - Mechatronika (ME)",
  year="2022",
  pages="1--6",
  address="Pilsen",
  doi="10.1109/ME54704.2022.9982985",
  isbn="978-1-6654-1040-3",
  url="https://ieeexplore.ieee.org/document/9982985"
}