Publication detail

ChemFET gas nanosensor arrays with alignment windows for assembly of single nanowires

CHMELA, O. GABLECH, I. SADÍLEK, J. BRODSKÝ, J. VALLEJOS VARGAS, S.

Original Title

ChemFET gas nanosensor arrays with alignment windows for assembly of single nanowires

Type

journal article in Web of Science

Language

English

Original Abstract

This work focuses on the fabrication and characterization of ChemFET (Chemical Field-Effect Transistor) gas nanosensor arrays based on single nanowire (SNW). The fabrication processes include micro and nanofabrication techniques enabled by a combination of ultraviolet (UV) and e-beam lithography to build the ChemFET structure. Results show the integration and connection of SNWs across the multiple pairs of nanoelectrodes in the ChemFET by dielectrophoresis process (DEP) thanks to the incorporation of alignment windows (200-300 nm) adapted to the diameter of the NWs. Measurements of the SNW ChemFET array's output and transfer characteristics prove the influence of gate bias on the drain current regulation. Tests upon hydrogen (H-2) and nitrogen dioxide (NO2) as analyte models of reducing and oxidizing gases show the ChemFET sensing functionality. Moreover, results demonstrate better response characteristics to H-2 when the ChemFET operates in the subthreshold regime. The design concepts and methods proposed for fabricating the SNW-based ChemFET arrays are versatile, reproducible, and most likely adaptable to other systems where SNW arrays are required.

Keywords

ChemFET nanosensors, Nanowires, Nanoelectrodes, Gas sensors

Authors

CHMELA, O.; GABLECH, I.; SADÍLEK, J.; BRODSKÝ, J.; VALLEJOS VARGAS, S.

Released

13. 4. 2023

Publisher

Springer

Location

Nano Research

ISBN

1998-0124

Periodical

NANO RES

Year of study

16

Number

4

State

People's Republic of China

Pages from

10244

Pages to

110234

Pages count

11

URL

https://www.sciopen.com/article/pdf/10.1007/s12274-023-5642-x.pdf

Full text in the Digital Library

http://hdl.handle.net/11012/245223

BibTex

@article{BUT183041,
  author="Ondřej {Chmela} and Imrich {Gablech} and Jakub {Sadílek} and Jan {Brodský} and Stella {Vallejos Vargas}",
  title="ChemFET gas nanosensor arrays with alignment windows for assembly of single nanowires",
  journal="NANO RES",
  year="2023",
  volume="16",
  number="4",
  pages="10244--110234",
  doi="10.1007/s12274-023-5642-x",
  issn="1998-0124",
  url="https://www.sciopen.com/article/pdf/10.1007/s12274-023-5642-x.pdf"
}