Publication detail

Demystifying data evaluation in the measurement of periodic structures

NEČAS, D. YACOOT, A. VALTR, M. KLAPETEK, P.

Original Title

Demystifying data evaluation in the measurement of periodic structures

Type

journal article in Web of Science

Language

English

Original Abstract

Periodic structures are often found in various areas of nanoscience and nanotechnology with many of them being used for metrological purposes either to calibrate instruments, or forming the basis of measuring devices such as encoders. Evaluating the period of one or two-dimensional periodic structures from topography measurements, e.g. performed using scanning probe microscopy, can be achieved using different methodologies with many grating evaluation methods having been proposed in the past and applied to a handful of examples. The optimum methodology for determining the grating period/pitch is not immediately obvious. This paper reports the results of extensive large-scale simulations and analysis to evaluate the performance of both direct and Fourier space data processing methods. Many thousands of simulations have been performed on a variety of different gratings under different measurement conditions and including the simulation of defects encountered in real life situations. The paper concludes with a summary of the merits and disadvantages of the methods together with practical recommendations for the measurements of periodic structures and for developing algorithms for processing them.

Keywords

scanning probe microscopy; data processing; traceability; grating pitch; nanometrology; uncertainty

Authors

NEČAS, D.; YACOOT, A.; VALTR, M.; KLAPETEK, P.

Released

1. 5. 2023

Publisher

IOP Publishing

Location

BRISTOL

ISBN

1361-6501

Periodical

Measurement Science and Technology

Year of study

34

Number

5

State

United Kingdom of Great Britain and Northern Ireland

Pages from

1

Pages to

21

Pages count

21

URL

https://iopscience.iop.org/article/10.1088/1361-6501/acbab3

Full text in the Digital Library

http://hdl.handle.net/11012/213690

BibTex

@article{BUT183772,
  author="David {Nečas} and Andrew {Yacoot} and Miroslav {Valtr} and Petr {Klapetek}",
  title="Demystifying data evaluation in the measurement of periodic structures",
  journal="Measurement Science and Technology",
  year="2023",
  volume="34",
  number="5",
  pages="1--21",
  doi="10.1088/1361-6501/acbab3",
  issn="1361-6501",
  url="https://iopscience.iop.org/article/10.1088/1361-6501/acbab3"
}