Publication detail

NOISE CHARAKTERISTICS OF MEMS ABSOLUTE PRESSURE SENSORS

MLČOCH, A.

Original Title

NOISE CHARAKTERISTICS OF MEMS ABSOLUTE PRESSURE SENSORS

Type

article in a collection out of WoS and Scopus

Language

English

Original Abstract

The resolution and accuracy of Micro-Electro-Mechanical Absolute Pressure Sensors (MEMS pressure sensors) have been steadily improving in recent years. Therefore, today MEMS pressure sensors are a promising solution for measuring not only absolute pressure but also relative pressure. One of the key parameters for selecting a sensor for a given application is the noise level of the particular sensor. The amount of sensor noise depends mainly on the sensor type and integration time. Longer integration times typically lead to noise suppression. Other influences can be temperature, absolute pressure, sensor age, and others. In the present paper, the effect of integration time on noise suppression will be investigated forseveralselected sensortypes and then the measured results will be evaluated.

Keywords

Absolute pressure sensor; Allan variation; MEMS; noise level

Authors

MLČOCH, A.

Released

26. 6. 2023

Publisher

Czech Technical University in Prague, Faculty of Electrical Engineering, Department of Measurement

Location

Prague

ISBN

978-80-01-07169-4

Book

Proceedings of 2nd Student Conference on Sensors, Systems and Measurement 2023

Edition

1

Pages from

9

Pages to

10

Pages count

2

URL

https://scssm.fel.cvut.cz/wp-content/uploads/2023/06/Proceedings-SCSSM-2023-.pdf

BibTex

@inproceedings{BUT183892,
  author="Albert {Mlčoch}",
  title="NOISE CHARAKTERISTICS OF MEMS ABSOLUTE PRESSURE SENSORS",
  booktitle="Proceedings of 2nd Student Conference on Sensors, Systems and Measurement 2023",
  year="2023",
  series="1",
  pages="9--10",
  publisher="Czech Technical University in Prague, Faculty of Electrical Engineering, Department of Measurement",
  address="Prague",
  isbn="978-80-01-07169-4",
  url="https://scssm.fel.cvut.cz/wp-content/uploads/2023/06/Proceedings-SCSSM-2023-.pdf"
}