Publication detail

Study of dielectric nanolayers and multilayer coated emitters

BURDA, D. ALLAHAM, M. HORÁČEK, M. KNÁPEK, A.

Original Title

Study of dielectric nanolayers and multilayer coated emitters

Type

presentation, poster

Language

English

Original Abstract

We report a fabrication method of multilayer coating of single tip field emitters. Tungsten field emitters are coated with a multilayer of refractory oxides such as Al2O3 , HfO2 , which act as an additional potential barrier in the metal-vacuum system. Introducing additional barriers to the emitter‘s metal vacuum interface system can alter its emission characteristics. Thin oxide barriers were prepared using a recipe that involved the use of low-temperature atomic layer deposition. The parameters of the grown layers were studied by field ion microscopy, and sca- nning transmission microscopy.

Keywords

Cold Field Emission; Multilayer Dielectric Structure; Tungsten Tips; Electron Tunneling; Atomic Layer Deposition

Authors

BURDA, D.; ALLAHAM, M.; HORÁČEK, M.; KNÁPEK, A.

Released

27. 7. 2023

Pages count

1

BibTex

@misc{BUT184450,
  author="Daniel {Burda} and Mohammad Mahmoud {Allaham} and Miroslav {Horáček} and Alexandr {Knápek}",
  title="Study of dielectric nanolayers and multilayer coated emitters",
  year="2023",
  pages="1",
  note="presentation, poster"
}