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MIDLIK, S. GABLECH, I. GOLEŇA, M. BRODSKÝ, J. SCHMORANZER, D.
Original Title
Parylene-bonded micro-fluidic channels for cryogenic experiments at superfluid He-4 temperatures
Type
journal article in Web of Science
Language
English
Original Abstract
We present the manufacturing process of a (24.5 × 100) μm2-sized on-chip flow channel intended for flow experiments with normal and superfluid phases of 4He and showcase such a proof-of-concept experiment. This work proves the suitability of chip-to-chip bonding using a thin layer of Parylene-C for cryogenic temperatures as a simpler alternative to other techniques, such as anodic bonding. A monocrystalline silicon chip embeds the etched meander-shaped micro-fluidic channel and a deposited platinum heater and is bonded to a Pyrex glass top. We test the leak tightness of the proposed bonding method for superfluid 4He, reaching temperatures of ≈1.6 K and evaluate its possible effects on flow experiments. We demonstrate that powering an on-chip platinum heater affects the superfluid flow rate by local overheating of a section of the micro-fluidic channel.
Keywords
Superfluids; Cryogenics; Microfluidic devices
Authors
MIDLIK, S.; GABLECH, I.; GOLEŇA, M.; BRODSKÝ, J.; SCHMORANZER, D.
Released
1. 3. 2024
Publisher
AIP Publishing
Location
Melville, NY
ISBN
0034-6748
Periodical
Review of Scientific Instruments
Year of study
95
Number
3
State
United States of America
Pages count
8
URL
https://pubs.aip.org/aip/rsi/article/95/3/033901/3268098/Parylene-bonded-micro-fluidic-channels-for?searchresult=1
BibTex
@article{BUT188206, author="MIDLIK, S. and GABLECH, I. and GOLEŇA, M. and BRODSKÝ, J. and SCHMORANZER, D.", title="Parylene-bonded micro-fluidic channels for cryogenic experiments at superfluid He-4 temperatures", journal="Review of Scientific Instruments", year="2024", volume="95", number="3", pages="8", doi="10.1063/5.0162532", issn="0034-6748", url="https://pubs.aip.org/aip/rsi/article/95/3/033901/3268098/Parylene-bonded-micro-fluidic-channels-for?searchresult=1" }