Publication detail

Mathematical Physics Analysis of Nozzle Shaping at the Gas Outlet from the Aperture to the Differentially Pumped Chamber in Environmental Scanning Electron Microscopy (ESEM)

MAXA, J. NEDĚLA, V. ŠABACKÁ, P. BINAR, T.

Original Title

Mathematical Physics Analysis of Nozzle Shaping at the Gas Outlet from the Aperture to the Differentially Pumped Chamber in Environmental Scanning Electron Microscopy (ESEM)

Type

journal article in Web of Science

Language

English

Original Abstract

A combination of experimental measurement preparations using pressure and temperature sensors in conjunction with the theory of one-dimensional isentropic flow and mathematical physics analyses is presented as a tool for analysis in this paper. Furthermore, the subsequent development of a nozzle for use in environmental electron microscopy between the specimen chamber and the differentially pumped chamber is described. Based on experimental measurements, an analysis of the impact of the nozzle shaping located behind the aperture on the character of the supersonic flow and the resulting dispersion of the electron beam passing through the differential pumped chamber is carried out on the determined pressure ratio using a combination of theory and mathematical physics analyses. The results show that nozzle shapes causing under-expanded gas outflow from the aperture to the nozzle have a worse impact on the dispersion of the primary electron beam. This is due to the flow velocity control. The controlled reduction in the static pressure curve on the primary electron beam path thus causes a significantly higher course of electron dispersion values than variants with shapes causing over-expanded gas outflow.

Keywords

Ansys Fluent; ESEM; critical flow; nozzle; CFD; numerical simulation

Authors

MAXA, J.; NEDĚLA, V.; ŠABACKÁ, P.; BINAR, T.

Released

20. 5. 2024

Publisher

MDPI

Location

BASEL

ISBN

1424-8220

Periodical

SENSORS

Year of study

24

Number

10

State

Swiss Confederation

Pages from

1

Pages to

26

Pages count

26

URL

https://www.mdpi.com/1424-8220/24/10/3243

Full text in the Digital Library

http://hdl.handle.net/11012/249358

BibTex

@article{BUT188712,
  author="Jiří {Maxa} and Vilém {Neděla} and Pavla {Šabacká} and Tomáš {Binar}",
  title="Mathematical Physics Analysis of Nozzle Shaping at the Gas Outlet from the Aperture to the Differentially Pumped Chamber in Environmental Scanning Electron Microscopy (ESEM)",
  journal="SENSORS",
  year="2024",
  volume="24",
  number="10",
  pages="1--26",
  doi="10.3390/s24103243",
  issn="1424-8220",
  url="https://www.mdpi.com/1424-8220/24/10/3243"
}