Publication detail

Comparison of optical and non-optical methods for measuring surface roughness

OHLÍDAL, I., OHLÍDAL, M., FRANTA, D., TYKAL, M.

Original Title

Comparison of optical and non-optical methods for measuring surface roughness

Type

conference paper

Language

English

Original Abstract

The values of the basic characteristics of surface roughness measured by means of optical and non-optical methods often differ mutually. So far a systematic comparison of the results obtained by those methods has not been done. The results we have achieved comparing optical and non-optical methods of the surface roughness measurement for selected samples of rough surfaces and for selected methods are presented.

Keywords

BASIC STATISTICAL PROPERTIES; ANGLE SPECKLE CORRELATION; 2-DIMENSIONAL FRAUNHOFER; SHEARING INTERFEROMETRY

Authors

OHLÍDAL, I., OHLÍDAL, M., FRANTA, D., TYKAL, M.

Released

1. 1. 1999

Publisher

SPIE-The International Society for Optical Engineering

Location

Washington, USA

ISBN

0-8194-3306-3

Book

11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics

Edition

Proceedings of SPIE

ISBN

0277-786X

Periodical

Proceedings of SPIE

Year of study

3820

State

United States of America

Pages from

456

Pages to

467

Pages count

12

BibTex

@inproceedings{BUT21568,
  author="Ivan {Ohlídal} and Miloslav {Ohlídal} and Daniel {Franta} and Miroslav {Tykal}",
  title="Comparison of optical and non-optical methods for measuring surface roughness",
  booktitle="11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics",
  year="1999",
  series="Proceedings of SPIE",
  journal="Proceedings of SPIE",
  volume="3820",
  pages="456--467",
  publisher="SPIE-The International Society for Optical Engineering",
  address="Washington, USA",
  doi="10.1117/12.353100",
  isbn="0-8194-3306-3",
  issn="0277-786X"
}