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KONVALINA, I. MÜLLEROVÁ, I.
Original Title
Factors affecting the Collection Efficiency of Secondary Electrons in SEM.
Type
conference paper
Language
English
Original Abstract
The Everhart-Thornley (ET) detector is the most often used type of secondary electron (SE) detector in the Scanning Electron Microscope (SEM). While the overall quality of the final image is influenced by all components of the detection channel, the collection efficiency (CE), which is defined as a ratio of collected SEs to all emitted ones, governs the image contrast and its signal to noise ratio. The detective quantum efficiency (DQE) of such detector has been found significantly below one. The main reason is in complicated distribution of electrostatic and magnetic fields in the specimen vicinity, which strongly influences the secondary electrons trajectories.
Keywords
ET detector, secondary electrons, collection efficiency
Authors
KONVALINA, I.; MÜLLEROVÁ, I.
Released
28. 8. 2005
Location
DAVOS
ISBN
1019-6447
Periodical
Microscopy Conference 2005
State
Swiss Confederation
Pages from
48
Pages to
49
Pages count
2
BibTex
@inproceedings{BUT21731, author="Ivo {Konvalina} and Ilona {Müllerová}", title="Factors affecting the Collection Efficiency of Secondary Electrons in SEM.", booktitle="Proceedings - Microscopy Conference 2005 - Dreiländertagung /6./", year="2005", journal="Microscopy Conference 2005", pages="2", address="DAVOS", issn="1019-6447" }