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SUTORÝ, T. KOLKA, Z.
Original Title
C-V Characterization of Nonlinear Capacitors Using CBCM Method
Type
conference paper
Language
English
Original Abstract
The paper deals with a modification of CBCM (Charge-Based Capacitance Measurements) for nonlinear capacitance characterization. The method is characterized by high resolution although it is based on equipment found in any average laboratory. CBCM was originally developed for linear interconnect measurements. The proposed modification uses two DC swept sources to measure the whole nonlinear Q-v characteristic in both polarities without the necessity to switch the measured object. A test-chip implementing the method was designed and manufactured in 0.35μm CMOS process. Verification against known capacitances proved the method correctness and accuracy. It was successfully used for MOSCAPs characterization in full operating voltage range.
Keywords
Microelectronics, CBCM, testing
Authors
SUTORÝ, T.; KOLKA, Z.
RIV year
2007
Released
21. 6. 2007
Publisher
Technical University of Lodz
Location
Lodž, Poland
ISBN
83-922632-9-4
Book
Proceedings of the 14th International Conference Mixed Design of Integrated Circuits and Systems 2007
Pages from
501
Pages to
505
Pages count
5
BibTex
@inproceedings{BUT23667, author="Tomáš {Sutorý} and Zdeněk {Kolka}", title="C-V Characterization of Nonlinear Capacitors Using CBCM Method", booktitle="Proceedings of the 14th International Conference Mixed Design of Integrated Circuits and Systems 2007", year="2007", pages="5", publisher="Technical University of Lodz", address="Lodž, Poland", isbn="83-922632-9-4" }