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Černoch, P., Jirák, J.
Original Title
Optimization of secondary electron detection by segmental ionization detector in environmental SEM
Type
conference paper
Language
English
Original Abstract
The article deals with a prezentation of results of optimization of secondary electron detection by an ionization detector in the environmental scanning electron microscope. The ionization detectors consisting of a varied electrode geometry and varied voltages on these electrodes, named segmental ionization detectors, are presented as a possibility to reach desired contrasts in a specimen image. In this work, images acquired by several detectors demonstrate detection of different types of signal electrons utilizing a specimen containing thin surface layers and a specimen made for a material contrast measurement. The segmental ionization detector optimized for true secondary electron detection is in the main focus.
Keywords
Environmental scanning electron microscope, secondary electrons, segmental ionization detector.
Authors
RIV year
2007
Released
1. 1. 2007
Publisher
Czechoslovak Microscopy Society
ISBN
978-80-239-9397-4
Book
Proceedings of the 8th Multinational Congress on Microscopy
Edition number
1
Pages from
79
Pages to
80
Pages count
2
BibTex
@inproceedings{BUT23831, author="Pavel {Černoch} and Josef {Jirák}", title="Optimization of secondary electron detection by segmental ionization detector in environmental SEM", booktitle="Proceedings of the 8th Multinational Congress on Microscopy", year="2007", number="1", pages="2", publisher="Czechoslovak Microscopy Society", isbn="978-80-239-9397-4" }