Publication detail

Detection of Signal Electrons in the Low Voltage SEM.

P. Wandrol, I. Müllerová

Original Title

Detection of Signal Electrons in the Low Voltage SEM.

Type

conference paper

Language

English

Original Abstract

This paper deals with the detection of signal electrons in the SEM at primary beam energies of 3 keV and less.

Keywords

signal electrons, detection, low voltage SEM

Authors

P. Wandrol, I. Müllerová

Released

22. 5. 2006

Publisher

Ústav přístrojové techniky AV ČR

Location

Brno

ISBN

80-239-6285-X

Book

Recent Trends in Charged Particle Optics and Surface Physics Instrumentation

Edition number

1

Pages from

71

Pages to

72

Pages count

2

BibTex

@inproceedings{BUT24229,
  author="Petr {Wandrol} and Ilona {Müllerová}",
  title="Detection of Signal Electrons in the Low Voltage SEM.",
  booktitle="Recent Trends in Charged Particle Optics and Surface Physics Instrumentation",
  year="2006",
  number="1",
  pages="2",
  publisher="Ústav přístrojové techniky AV ČR",
  address="Brno",
  isbn="80-239-6285-X"
}