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Publication detail
P. Wandrol, I. Müllerová
Original Title
Detection of Signal Electrons in the Low Voltage SEM.
Type
conference paper
Language
English
Original Abstract
This paper deals with the detection of signal electrons in the SEM at primary beam energies of 3 keV and less.
Keywords
signal electrons, detection, low voltage SEM
Authors
Released
22. 5. 2006
Publisher
Ústav přístrojové techniky AV ČR
Location
Brno
ISBN
80-239-6285-X
Book
Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
Edition number
1
Pages from
71
Pages to
72
Pages count
2
BibTex
@inproceedings{BUT24229, author="Petr {Wandrol} and Ilona {Müllerová}", title="Detection of Signal Electrons in the Low Voltage SEM.", booktitle="Recent Trends in Charged Particle Optics and Surface Physics Instrumentation", year="2006", number="1", pages="2", publisher="Ústav přístrojové techniky AV ČR", address="Brno", isbn="80-239-6285-X" }