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IVANOV, P., HUBÁLEK, J.
Original Title
Screen-printed films for sensor microsystems
Type
conference paper
Language
English
Original Abstract
By means of an adapted screen-printing technique, sensitive layers of tin and tungsten oxide (pure and doped with 1% in weight of Au, Pt and Pd) were deposited on silicon micromachined substrates with low thermal inertia. Each chip contains four membranes with different active layers. The sensor response to ethylene, ethanol, amonia and thein bojary mixtures was studied. It is shown that these species can be easily discriminated, even at low concentrations (1ppm), which makes the micro array designed suitable to monitor climacteric fruit dutiny storage in warehouses or storage chambers.
Keywords
Micro-hot plate sensor arrays; Noble metal loading; Thick-film metal oxide gas sensors; Ethylene monitoring
Authors
Released
16. 10. 2006
Publisher
Chania, Crete Institute of Technology, Greece
ISBN
960-8025-99-8
Book
Socrates International Conference. Electronic System Design 2006.
Pages from
67
Pages to
71
Pages count
5
BibTex
@inproceedings{BUT24424, author="Jaromír {Hubálek}", title="Screen-printed films for sensor microsystems", booktitle="Socrates International Conference. Electronic System Design 2006.", year="2006", pages="5", publisher="Chania, Crete Institute of Technology, Greece", isbn="960-8025-99-8" }