Publication detail

Detection of the True Secondary Electrons with a Newly Designed Ionization Detector for ESEM.

Neděla V., Linhart H., Autrata R.

Original Title

Detection of the True Secondary Electrons with a Newly Designed Ionization Detector for ESEM.

Type

conference paper

Language

English

Original Abstract

The detection of pure secondary electrons (SE) with energy lower than 50eV, typically 5eV, by suppressing the backscattered electrons (BSE) minimizes the influence of material information in recorded picture and enables the study of topographical structure of the specimen with high resolution.

Keywords

SE,BSE,detection system

Authors

Neděla V., Linhart H., Autrata R.

RIV year

2006

Released

1. 1. 2006

Location

Sapporo

Pages from

982

Pages to

983

Pages count

2

BibTex

@inproceedings{BUT24787,
  author="Vilém {Neděla} and Jan {Linhart}",
  title="Detection of the True Secondary Electrons with a Newly Designed Ionization Detector for ESEM.",
  booktitle="16th International Microscopy Congress",
  year="2006",
  pages="2",
  address="Sapporo"
}