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ŠIKULA, J. PAVELKA, J. SEDLÁKOVÁ, V. HLÁVKA, J. TACANO, M. TOITA, M.
Original Title
RTS Noise and quantum transitions in submicron MOSFETs
Type
conference paper
Language
English
Original Abstract
We compare two models of charge carrier capture and emission in silicon MOSFET, which is a source of RTS noise. In the SiO2 gate insulating layer and its interface with Si channel there is a high number of oxygen vacancies, creating localised states and traps. Electron exchange between channel and traps within several nanometers distance is given by tunnelling processes and leads to generation of 1/f noise. Two possible mechanisms of electron tunnelling are discussed and theoretical results are compared to experimental dependence of capture and emission parameters as a function of gate and drain voltage (electric field intensity) and temperature.
Keywords
RTS noise, 1/f noise, MOSFET
Authors
ŠIKULA, J.; PAVELKA, J.; SEDLÁKOVÁ, V.; HLÁVKA, J.; TACANO, M.; TOITA, M.
RIV year
2007
Released
15. 11. 2007
Publisher
VUT
Location
Brno
ISBN
978-80-7355-078-3
Book
New Trends in Physics
Pages from
138
Pages to
141
Pages count
4
BibTex
@inproceedings{BUT27881, author="Josef {Šikula} and Jan {Pavelka} and Vlasta {Sedláková} and Jan {Hlávka} and Munecazu {Tacano} and Masato {Toita}", title="RTS Noise and quantum transitions in submicron MOSFETs", booktitle="New Trends in Physics", year="2007", pages="138--141", publisher="VUT", address="Brno", isbn="978-80-7355-078-3" }