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Publication detail
FICEK, R. VRBA, R.
Original Title
Micro-Electro-Mechanical Systems (MEMS)
Type
conference paper
Language
English
Original Abstract
In this article the new pressure sensors using carbon nanotubes (CNTs) arrays as the electron source in emission sensor or as the surface increase element in capacitance sensor are presented. Both sensors are made of the two parts; elastic electrodesensing film fabricated by anisotropic etching and solid electrode. The emission sensor has elastic anode electrode with membrane and carbon nanotubes (MWCNTs) arrays cathode in the chamber. The capacitance sensor has the same topology extensive by CNT on both electrodes. The MWCNTs were grown by plasma enhanced chemical vapour deposition (PECVD) in plasma reactor.
Keywords
carbon nanotubes, emission, pressure sensor
Authors
FICEK, R.; VRBA, R.
Released
4. 9. 2007
Publisher
Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105
Location
Brno
ISBN
978-80-214-3535-3
Book
Moderní metody řešení, návrhu a aplikace elektronických obvodů
Edition number
první
Pages from
48
Pages to
51
Pages count
4
BibTex
@inproceedings{BUT28141, author="Richard {Ficek} and Radimír {Vrba}", title="Micro-Electro-Mechanical Systems (MEMS)", booktitle="Moderní metody řešení, návrhu a aplikace elektronických obvodů", year="2007", number="první", pages="48--51", publisher="Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105", address="Brno", isbn="978-80-214-3535-3" }