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ČECH, V. STUDÝNKA, J. JONES, F.
Original Title
Nanoindentation measurements of plasma polymer films
Type
conference paper
Language
English
Original Abstract
Mechanical properties of thin films deposited from a mixture of tetravinylsilane vapor and oxygen gas by plasma-enhanced chemical vapor deposition were investigated using nanoindentaion. The Young's modulus and hardness of the film increased with enhanced RF power while a significant rise of oxygen concentration in the film resulted in descent of mechanical constants.
Keywords
nanoindentation, plasma polymerization, thin film
Authors
ČECH, V.; STUDÝNKA, J.; JONES, F.
RIV year
2007
Released
13. 12. 2007
ISBN
978-4-9903773-2-8
Book
18th International Symposium on Plasma Chemistry
Pages from
1
Pages to
4
Pages count
BibTex
@inproceedings{BUT28335, author="Vladimír {Čech} and Jan {Studýnka} and Frank {Jones}", title="Nanoindentation measurements of plasma polymer films", booktitle="18th International Symposium on Plasma Chemistry", year="2007", pages="1--4", isbn="978-4-9903773-2-8" }