Publication detail

Physical versus chemical properties of plasma-polymerized a-SiOC:H films

ČECH, V. STUDÝNKA, J. ČECHALOVÁ, B. JONES, F. PEŘINA, V. ZEMEK, J.

Original Title

Physical versus chemical properties of plasma-polymerized a-SiOC:H films

Type

conference paper

Language

English

Original Abstract

Plasma-polymerized a-SiOC:H films were deposited from a mixture of tetravinylsilane vapor and oxygen gas at different power (0.1-10 W) and oxygen-to-total flow rate ratio (0-0.79). The Young's modulus, hardness, refractive index, extinction coefficient, and band gap of the plasma polymer were found to be controlled by the ratio between the content of carbon and oxygen atoms in films.

Keywords

thin film, mechanical properties, optical properties, chemical properties

Authors

ČECH, V.; STUDÝNKA, J.; ČECHALOVÁ, B.; JONES, F.; PEŘINA, V.; ZEMEK, J.

RIV year

2007

Released

13. 12. 2007

ISBN

978-4-9903773-2-8

Book

18th International Symposium on Plasma Chemistry

Pages from

1

Pages to

4

Pages count

4

BibTex

@inproceedings{BUT28336,
  author="Vladimír {Čech} and Jan {Studýnka} and Božena {Čechalová} and Frank {Jones} and Vratislav {Peřina} and Josef {Zemek}",
  title="Physical versus chemical properties of plasma-polymerized a-SiOC:H films",
  booktitle="18th International Symposium on Plasma Chemistry",
  year="2007",
  pages="1--4",
  isbn="978-4-9903773-2-8"
}