Publication detail

Mechanical properties of plasma polymer films

ČECH, V. STUDÝNKA, J. ČECHALOVÁ, B. MISTRÍK, J. ZEMEK, J.

Original Title

Mechanical properties of plasma polymer films

Type

conference paper

Language

English

Original Abstract

Plasma polymer films were deposited from vinyltriethoxysilane monomer on polished silicon wafers at selected deposition conditions using pulsed plasma (PECVD). Nanoindentation measurements were carried out in order to analyze selected mechanical properties of deposited films. Depth profile of the Young's modulus was discussed with respect to ellipsometric data, surface morphology measured by AFM, and chemical analyses.

Keywords

mechanical properties

Authors

ČECH, V.; STUDÝNKA, J.; ČECHALOVÁ, B.; MISTRÍK, J.; ZEMEK, J.

RIV year

2007

Released

13. 12. 2007

Pages from

1

Pages to

5

Pages count

5

BibTex

@inproceedings{BUT28342,
  author="Vladimír {Čech} and Jan {Studýnka} and Božena {Čechalová} and Jan {Mistrík} and Josef {Zemek}",
  title="Mechanical properties of plasma polymer films",
  booktitle="Lokální mechanické vlastnosti",
  year="2007",
  pages="1--5"
}