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BEČVÁŘ, D., HUBÁLEK, J., VRBA, R., MUSIL, V.
Original Title
Methods of measurement of capacitive pressure sensors
Type
conference paper
Language
English
Original Abstract
Novel methods of pressure measurement of capacitive sensors are presented. All of them are shown as very suitable for on-chip realisations. The very small capacity measurement, high resolution and auto-calibrated techniques are described in this paper.
Key words in English
measurement methods, capacitive sensor, pressure sensor, integrated circuit
Authors
RIV year
2001
Released
12. 9. 2001
Publisher
Ing. Zdeněk Novotný, CSc.
Location
Brno
ISBN
80-214-1960-1
Book
Electronic devices and systems 01 - Proceedings
Edition number
1
Pages from
242
Pages to
247
Pages count
6
BibTex
@inproceedings{BUT2847, author="Daniel {Bečvář} and Jaromír {Hubálek} and Radimír {Vrba} and Vladislav {Musil}", title="Methods of measurement of capacitive pressure sensors", booktitle="Electronic devices and systems 01 - Proceedings", year="2001", number="1", pages="6", publisher="Ing. Zdeněk Novotný, CSc.", address="Brno", isbn="80-214-1960-1" }