Publication detail

Scintillationsecondary electron detector for variable pressure scanning electron microscope

ČUDEK, P.

Original Title

Scintillationsecondary electron detector for variable pressure scanning electron microscope

Type

conference paper

Language

English

Original Abstract

This article deals with a scintillation detector of secondary electrons for variable pressure scanning electron microscope. The influence of the change of voltages on electrode system of the detector and on scintillator on secondary electrons detection is proved

Keywords

Scanning electron microscope (SEM), variable pressure scanning electron microscope (VPSEM), scintillation detector (SD), secondary electrons (SE).

Authors

ČUDEK, P.

RIV year

2009

Released

23. 4. 2009

Publisher

Novpress s.r.o

Location

Brno

ISBN

978-80-214-3869-9

Book

Proceedings of the 15th conference Student EEICT 2009 - Volume 3

Edition number

1

Pages from

187

Pages to

191

Pages count

4

URL

http://www.feec.vutbr.cz/EEICT/

BibTex

@inproceedings{BUT29978,
  author="Pavel {Čudek}",
  title="Scintillationsecondary electron detector for variable pressure scanning electron microscope",
  booktitle="Proceedings of the 15th conference Student EEICT 2009 - Volume 3",
  year="2009",
  number="1",
  pages="187--191",
  publisher="Novpress s.r.o",
  address="Brno",
  isbn="978-80-214-3869-9",
  url="http://www.feec.vutbr.cz/EEICT/"
}