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Publication detail
TOMÁNEK, P.
Original Title
Optical nanometrology
Type
conference paper
Language
English
Original Abstract
In the paper some basic optical near-field principles are explained as well as an overview of the techniques used in the optical near-field is done. Two examples of applications like nanoscale topography and local fluorescence of dielectric film with lateral superresolution, and local spectroscopy of semiconductors are also presented.
Keywords
optical nanometrology, near-field optics, nanoscale topography, local fluorescence, superresolution, local spectroscopy.
Authors
RIV year
2001
Released
1. 4. 2001
Publisher
Brno University of Technology, Faculty of Chemistry
Location
Brno
ISBN
80-214-1893-1
Book
Electronic properties of molecular materials and functional polymers
Pages from
143
Pages to
150
Pages count
8
BibTex
@{BUT72225 }