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MICHÁLEK, M., JIRÁK, J.
Original Title
Modified configuration of ionization detector for environmental SEM
Type
conference paper
Language
English
Original Abstract
Comparision of the dependence of the signal on the pressure in the specimen chamber detected by parallel plate electrode system and by modified configuration of electrodes.
Key words in English
Environmental scanning electron microscopy, ionization detector electrode configuration
Authors
RIV year
2001
Released
20. 9. 2001
Publisher
Rinton Press, Inc.
Location
Princeton, New Jersey, USA
ISBN
1-58949-003-7
Book
Proceedings of 5th Multinational Congress on Electron Microscopy
Pages from
529
Pages to
530
Pages count
2
BibTex
@inproceedings{BUT3221, author="Martin {Michálek} and Josef {Jirák}", title="Modified configuration of ionization detector for environmental SEM", booktitle="Proceedings of 5th Multinational Congress on Electron Microscopy", year="2001", pages="2", publisher="Rinton Press, Inc.", address="Princeton, New Jersey, USA", isbn="1-58949-003-7" }