Publication detail

Plasma Polymerization Processes Diagnostic by Langmuir Probes and Emission Spectroscopy

HORVÁTH, P., KRČMA, F., KUŘITKA, I.

Original Title

Plasma Polymerization Processes Diagnostic by Langmuir Probes and Emission Spectroscopy

Type

conference paper

Language

English

Original Abstract

Processes during the plasmochemical deposition of the organosilicones have been studied by Langmuire double probes and simultaniously by optical emision spectroscopy. Main parameters as temperature, plasma potential and excited particles have been obtained.

Keywords

Plasma polymerization, Langmuir probes, emission spectroscopy

Authors

HORVÁTH, P., KRČMA, F., KUŘITKA, I.

Released

1. 1. 1999

Publisher

Jednota slovenských matematikov a fyzikov

Location

Bratislava

ISBN

80-223-1370-X

Book

Proceedings of 12th Symposium on Application of Plasma Processes

Edition number

1

Pages from

167

Pages to

168

Pages count

2

BibTex

@inproceedings{BUT3256,
  author="Pavel {Horváth} and František {Krčma} and Ivo {Kuřitka}",
  title="Plasma Polymerization Processes Diagnostic by Langmuir Probes and Emission Spectroscopy",
  booktitle="Proceedings of 12th Symposium on Application of Plasma Processes",
  year="1999",
  number="1",
  pages="2",
  publisher="Jednota slovenských matematikov a fyzikov",
  address="Bratislava",
  isbn="80-223-1370-X"
}