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PEKÁREK, J. VRBA, R. FICEK, R. MAGÁT, M.
Original Title
Carbon nanostructures used in capacitive sensors as the surface increase element
Type
conference paper
Language
English
Original Abstract
Novel pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the surface increase element in capacitive sensors. The CNTs were grown by plasma enhanced chemical vapor deposition (PECVD) by using iron as a catalyst in an atmospheric pressure microwave torch. The capacitive sensor takes advantage of CNTs dimensions to increase the surface. This means that the CNTs arrays in the capacitive sensors increase the surface of the electrodes, which are similar to a plate capacitor.
Keywords
Pressure sensor, carbon nanotubes, plasma enhanced chemical vapor deposition
Authors
PEKÁREK, J.; VRBA, R.; FICEK, R.; MAGÁT, M.
RIV year
2009
Released
17. 9. 2009
Publisher
Budapest University of Technology and Economics, Budapest, Hungary
Location
Budapest
ISBN
978-1-4244-5132-6
Book
SIITME 2009, 15th International Symposium for Design and Technology of Electronics Packages, Conference Proceedings
Edition
1.
Pages from
323
Pages to
326
Pages count
4
BibTex
@inproceedings{BUT33190, author="Jan {Pekárek} and Radimír {Vrba} and Richard {Ficek} and Martin {Magát}", title="Carbon nanostructures used in capacitive sensors as the surface increase element", booktitle="SIITME 2009, 15th International Symposium for Design and Technology of Electronics Packages, Conference Proceedings", year="2009", series="1.", pages="323--326", publisher="Budapest University of Technology and Economics, Budapest, Hungary", address="Budapest", isbn="978-1-4244-5132-6" }