Publication detail

Carbon nanostructures used in capacitive sensors as the surface increase element

PEKÁREK, J. VRBA, R. FICEK, R. MAGÁT, M.

Original Title

Carbon nanostructures used in capacitive sensors as the surface increase element

Type

conference paper

Language

English

Original Abstract

Novel pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the surface increase element in capacitive sensors. The CNTs were grown by plasma enhanced chemical vapor deposition (PECVD) by using iron as a catalyst in an atmospheric pressure microwave torch. The capacitive sensor takes advantage of CNTs dimensions to increase the surface. This means that the CNTs arrays in the capacitive sensors increase the surface of the electrodes, which are similar to a plate capacitor.

Keywords

Pressure sensor, carbon nanotubes, plasma enhanced chemical vapor deposition

Authors

PEKÁREK, J.; VRBA, R.; FICEK, R.; MAGÁT, M.

RIV year

2009

Released

17. 9. 2009

Publisher

Budapest University of Technology and Economics, Budapest, Hungary

Location

Budapest

ISBN

978-1-4244-5132-6

Book

SIITME 2009, 15th International Symposium for Design and Technology of Electronics Packages, Conference Proceedings

Edition

1.

Pages from

323

Pages to

326

Pages count

4

BibTex

@inproceedings{BUT33190,
  author="Jan {Pekárek} and Radimír {Vrba} and Richard {Ficek} and Martin {Magát}",
  title="Carbon nanostructures used in capacitive sensors as the surface increase element",
  booktitle="SIITME 2009, 15th International Symposium for Design and Technology of Electronics Packages, Conference Proceedings",
  year="2009",
  series="1.",
  pages="323--326",
  publisher="Budapest University of Technology and Economics, Budapest, Hungary",
  address="Budapest",
  isbn="978-1-4244-5132-6"
}