Publication detail

Scintillation secondary electron detector for VP-SEM

ČUDEK, P.

Original Title

Scintillation secondary electron detector for VP-SEM

Type

conference paper

Language

English

Original Abstract

The article deals with the scintillation secondary electron detector for a variable pressure scanning electron microscope, its electrode system optimization and measurement of the pressure in the detector for different types of pressure limiting apertures.

Keywords

Scintillation SE detector, secondary electrons (SE), variable pressure scanning electron microscope (VP-SEM), voltage contrast.

Authors

ČUDEK, P.

RIV year

2011

Released

28. 4. 2011

ISBN

978-80-214-4273-3

Book

Student EEICT proceedings of the 17th conference volume 3

Edition number

1

Pages from

402

Pages to

406

Pages count

5

BibTex

@inproceedings{BUT36880,
  author="Pavel {Čudek}",
  title="Scintillation secondary electron detector for VP-SEM",
  booktitle="Student EEICT proceedings of the 17th conference volume 3",
  year="2011",
  number="1",
  pages="402--406",
  isbn="978-80-214-4273-3"
}