Publication detail

Plasma-Polymerized Thin Films of Hexamethyldisiloxane Prepared at Low RF Power

BÁLKOVÁ, R., PŘIKRYL, R., SALYK, O.

Original Title

Plasma-Polymerized Thin Films of Hexamethyldisiloxane Prepared at Low RF Power

Type

conference paper

Language

English

Original Abstract

The plasma-polymerized HMDSO films were characterized by many techniques suitable to investigate their mechanical and thermal properties, and to determine composition, structure and surface morphology.

Key words in English

thin films, plasma polymerization, FTIR, ESCA/XPS, scratch test, modulus

Authors

BÁLKOVÁ, R., PŘIKRYL, R., SALYK, O.

RIV year

2001

Released

1. 1. 2001

Publisher

GREMI, CNRS/University of Orleans

Location

Orleans, France

Pages from

1747

Pages to

1753

Pages count

7

BibTex

@inproceedings{BUT3791,
  author="Radka {Bálková} and Radek {Přikryl} and Ota {Salyk}",
  title="Plasma-Polymerized Thin Films of Hexamethyldisiloxane Prepared at Low RF Power",
  booktitle="15th Int. Symposium on Plasma Chemistry",
  year="2001",
  pages="7",
  publisher="GREMI, CNRS/University of Orleans",
  address="Orleans, France"
}