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AUTRATA, R., JIRÁK, J., ŠPINKA, J.
Original Title
Detection of SEs and BSEs at Higher Pressure
Type
conference paper
Language
English
Original Abstract
The article deals with the problem of a detection of signal electrons in the scanning electron microscope working at higher pressures in the specimen chamber with an ionization and a scintillation type of detector.
Key words in English
SEM, ESEM, detection of SE and BSE
Authors
RIV year
1999
Released
5. 9. 1999
Publisher
University of Veszprém
Location
Veszprém
Pages from
285
Pages to
286
Pages count
2
BibTex
@inproceedings{BUT393, author="Rudolf {Autrata} and Josef {Jirák} and Jiří {Špinka}", title="Detection of SEs and BSEs at Higher Pressure", booktitle="Proceedings of the 4th Multinational Congress on Electron Mi", year="1999", pages="2", publisher="University of Veszprém", address="Veszprém" }