Publication detail

Signal detection in SEM at higher pressure

AUTRATA, R., JIRÁK, J., ŠPINKA, J.

Original Title

Signal detection in SEM at higher pressure

Type

conference paper

Language

English

Original Abstract

The article deals with the problem of a scanning electron microscopy at higher pressure and detection of signal electrons with ionization and scintillation type of detector

Key words in English

SEM, ESEM, detection by scintillation and ionization detector

Authors

AUTRATA, R., JIRÁK, J., ŠPINKA, J.

RIV year

1999

Released

13. 5. 1999

Publisher

Society for Electron Microscopy

Location

Zagreb

Pages from

63

Pages to

64

Pages count

2

BibTex

@inproceedings{BUT394,
  author="Rudolf {Autrata} and Josef {Jirák} and Jiří {Špinka}",
  title="Signal detection in SEM at higher pressure",
  booktitle="1st Congress of the Croatian Society for Electron Microscopy",
  year="1999",
  pages="2",
  publisher="Society for Electron Microscopy",
  address="Zagreb"
}